One-probe Nanoprobing of Power Devices and Electronic Packages

The rapid growth of SiC (Silicon Carbide) devices in the power and automotive industries is driving the need for advanced techniques in semiconductor analysis. Watch our exclusive webinar to gain insights into the unique combinations of Electron Beam Induced Current (EBIC) and Passive Voltage Contrast (PVC), and how these methods provide complimentary data essential for thorough junction analysis.

 Our speaker, Andrew  Elliott delves into a case study where commercially available SiC MOSFET devices were cross sectioned with a Crossbeam FIB-SEM in preparation for characterisation. The cross sections were then imaged with a Kleindiek MM3E nanoprober, installed in a Sigma SEM on an angled stub, with beam conditions of 1.5 kV to 20 kV with a 60 µm aperture. PVC highlighted the electron affinity or work function of various implant regions of the surface, showing strong contrasts between p and n regions. In contrast, EBIC is an image of the beam current response to electric fields associated with the depletion zones of a p/n junction. Depletion zones were easily characterised in the EBIC data. Overall, this work shows a variety of junction measurements can be easily performed and provide insights for optimization of device performance in compound semiconductors.

What You’ll Learn

• Practical Applications: See real-world applications with a case study on commercially available SiC MOSFET devices, including cross-sectional imaging and analysis.
• Optimization Insights: Learn how these advanced techniques can uncover opportunities to optimize the performance and reliability of SiC devices in your projects.
• Expert Knowledge: Engage with industry experts who will share their hands-on experiences and findings, providing you with valuable takeaways for your work.

Who Attended

• Semiconductor engineers and researchers
• Power electronics professionals
• Automotive industry experts
• Quality control and manufacturing specialists
• Anyone interested in advanced semiconductor technologies
  

Why Watch the Recording?

This webinar is designed for professionals seeking to stay at the forefront of semiconductor technology. Whether you're involved in design, manufacturing, or quality control, this session provides you actionable insights that can directly impact your work. Don’t miss this opportunity to learn about the latest techniques in SiC device characterization and optimization.